Inventor · disambiguated record
Theodorus A. Fahner
Also filed as: FAHNER THEODORUS A
3 granted patents·200 citations·filing 1980–1991
77Inventor score
Top patents by PatentIndex Score
3 records- 0192US5144363AApparatus for and method of projecting a mask pattern on a substrateASM LITHOGRAPHY BV·Filed 1991·Granted Sep 1, 1992·112 cites·71 claims
- 0288US4356392AOptical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formedPHILIPS CORP·Filed 1980·Granted Oct 26, 1982·63 cites·5 claims
- 0381US4334139AApparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particlesPHILIPS CORP·Filed 1980·Granted Jun 8, 1982·25 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →