Inventor · disambiguated record

Thomas Ihl

Also filed as: IHL THOMAS

1 granted patent·11 citations·filing 2009–2009

34Inventor score

Technology areasG03F

Files withSIX STEPHAN1

Top patents by PatentIndex Score

1 record

0182US8279402B2Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the sameSIX STEPHAN·Filed 2009·Granted Oct 2, 2012·11 cites·27 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →