Inventor · disambiguated record
Thomas A. Kamp
Also filed as: KAMP THOMAS A
3 granted patents·1 pending application·16 citations·filing 2003–2007
67Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0169US7682980B2Method to improve profile control and N/P loading in dual doped gate applicationsLAM RES CORP·Filed 2007·Granted Mar 23, 2010·3 cites·10 claims
- 0260US7098141B1Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structuresLAM RES CORP·Filed 2003·Granted Aug 29, 2006·7 cites·31 claims
- 0358US7186661B2Method to improve profile control and N/P loading in dual doped gate applicationsLAM RES CORP·Filed 2003·Granted Mar 6, 2007·6 cites·3 claims
- 0431US2006043066A1Processes for pre-tapering silicon or silicon-germanium prior to etching shallow trenchesKAMP THOMAS A·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →