Inventor · disambiguated record
Thomas Kemen
Also filed as: KEMEN THOMAS
27 granted patents·528 citations·filing 2006–2021
97Inventor score
Files withZEISS CARL MICROSCOPY GMBH15APPLIED MATERIALS ISRAEL LTD2ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2KNIPPELMEYER RAINER2ZEIDLER DIRK2
Top patents by PatentIndex Score
27 records- 0198US10541112B2Charged particle beam system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2018·Granted Jan 21, 2020·28 cites·34 claims
- 0298US10354831B2Charged particle inspection method and charged particle systemZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Jul 16, 2019·30 cites·6 claims
- 0396US10741355B1Multi-beam charged particle systemZEISS CARL MICROSCOPY GMBH·Filed 2019·Granted Aug 11, 2020·44 cites·20 claims
- 0496US10600613B2Particle beam systemZEISS CARL MICROSCOPY GMBH·Filed 2018·Granted Mar 24, 2020·33 cites·10 claims
- 0596US9263233B2Charged particle multi-beam inspection system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Feb 16, 2016·39 cites·5 claims
- 0696US9224576B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Dec 29, 2015·18 cites·10 claims
- 0796US7554094B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsCARL ZEISS SMT A G·Filed 2007·Granted Jun 30, 2009·29 cites·23 claims
- 0895US9653254B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted May 16, 2017·33 cites·22 claims
- 0995US9099282B2Focusing a charged particle imaging systemAPPLIED MATERIALS ISRAEL LTD·Filed 2014·Granted Aug 4, 2015·19 cites·38 claims
- 1094US9991089B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Jun 5, 2018·34 cites·24 claims
- 1194US9673024B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jun 6, 2017·9 cites·15 claims
- 1294US9530613B2Focusing a charged particle systemROGERS STEVEN R·Filed 2012·Granted Dec 27, 2016·36 cites·20 claims
- 1394US9349571B2Particle optical systemZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted May 24, 2016·33 cites·18 claims
- 1494US8598525B2Particle beam systemZEIDLER DIRK·Filed 2011·Granted Dec 3, 2013·29 cites·21 claims
- 1594US8039813B2Charged particle-optical systems, methods and componentsZEISS CARL SMT GMBH·Filed 2006·Granted Oct 18, 2011·32 cites·57 claims
- 1693US9552957B2Particle beam systemZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jan 24, 2017·10 cites·23 claims
- 1793US8637834B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2011·Granted Jan 28, 2014·17 cites·21 claims
- 1893US8097847B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2009·Granted Jan 17, 2012·16 cites·12 claims
- 1991US9324537B2Charged particle inspection method and charged particle systemZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Apr 26, 2016·8 cites·16 claims
- 2090US11495433B1Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimenICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Nov 8, 2022·3 cites·18 claims
- 2189US10504681B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 10, 2019·3 cites·14 claims
- 2289US9799485B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Oct 24, 2017·8 cites·10 claims
- 2386US9384938B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEIDLER DIRK·Filed 2011·Granted Jul 5, 2016·9 cites·18 claims
- 2485US10147582B2Particle beam systemZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 4, 2018·3 cites·20 claims
- 2580US10121635B2Charged particle beam system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Nov 6, 2018·3 cites·22 claims
- 2676US10784070B2Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Sep 22, 2020·2 cites·16 claims
- 2766US11087948B2Multi-beam charged particle systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Aug 10, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →