Inventor · disambiguated record
Thomas Korb
Also filed as: KORB THOMAS · KORB THOMAS K E
28 granted patents·31 pending applications·65 citations·filing 1996–2025
93Inventor score
Top patents by PatentIndex Score
59 records- 0192US10042248B2Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unitZEISS CARL SMT GMBH·Filed 2015·Granted Aug 7, 2018·22 cites·20 claims
- 0287US12175650B2Processing image data setsZEISS CARL SMT GMBH·Filed 2021·Granted Dec 24, 2024·2 cites·24 claims
- 0387US10901391B1Multi-scanning electron microscopy for wafer alignmentZEISS CARL SMT GMBH·Filed 2019·Granted Jan 26, 2021·10 cites·20 claims
- 0483US9910360B2Lighting system of a microlithographic projection exposure system and method for operating such a lighting systemZEISS CARL SMT GMBH·Filed 2016·Granted Mar 6, 2018·2 cites·15 claims
- 0583US9500954B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Nov 22, 2016·3 cites·21 claims
- 0682US10444631B2Method of operating a microlithographic projection apparatus and illumination system of such an apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Oct 15, 2019·2 cites·22 claims
- 0780US12293895B2Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methodsZEISS CARL SMT GMBH·Filed 2023·Granted May 6, 2025·0 cites·21 claims
- 0878US2025357165A1Methods of cross-section imaging of an inspection volume in a waferZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0978US2024328970A1Method of 3d volume inspection of semiconductor wafers with increased throughputZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1072US8786849B2Method for measuring an optical systemZEISS CARL SMT GMBH·Filed 2013·Granted Jul 22, 2014·2 cites·31 claims
- 1172US2025364206A1Method and systems for balancing charges on a surface of an object comprising integrated circuit patterns in a scanning electron microscopeZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1271US9310690B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Apr 12, 2016·1 cites·21 claims
- 1370US2025391709A1Sample preparation for charged particle beam imagingZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1468US11810749B2Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methodsZEISS CARL SMT GMBH·Filed 2021·Granted Nov 7, 2023·0 cites·33 claims
- 1568US2025239474A1Contact area size determination between 3d structures in an integrated semiconductor sampleZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1667US12283504B2Contact area size determination between 3D structures in an integrated semiconductor sampleZEISS CARL SMT GMBH·Filed 2022·Granted Apr 22, 2025·0 cites·20 claims
- 1765US11915908B2Method for measuring a sample and microscope implementing the methodZEISS CARL SMT GMBH·Filed 2021·Granted Feb 27, 2024·0 cites·21 claims
- 1865US9946161B2Optical system for a microlithographic projection exposure apparatus and microlithographic exposure methodZEISS CARL SMT GMBH·Filed 2012·Granted Apr 17, 2018·1 cites·27 claims
- 1964US2025093770A1Illumination optical unit for a mask inspection systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2063US2023196189A1Measurement method and apparatus for semiconductor features with increased throughputZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 2162US2025362253A13d volume inspection method and method of configuring of a 3d volume inspection methodZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 2261US12148139B2Methods and evaluation devices for analyzing three-dimensional data sets representing devicesZEISS CARL SMT GMBH·Filed 2021·Granted Nov 19, 2024·0 cites·20 claims
- 2361US2024242334A1Method for defect detection in a semiconductor sample in sample images with distortionCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 2461US2024411296A1Computer implemented method for the detection and classification of anomalies in an imaging dataset of a wafer, and systems making use of such methodsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2561US2025299915A1Image generation with improved scanning lines for smart charge distributionZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 2661US2025022680A13d volume inspection of semiconductor wafers with increased throughput and accuracyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2760US11848172B2Method for measuring a sample and microscope implementing the methodZEISS CARL SMT GMBH·Filed 2021·Granted Dec 19, 2023·0 cites·25 claims
- 2860US5690056ASquirrel proof bird feederFiled 1996·Granted Nov 25, 1997·20 cites·15 claims
- 2960US2025272946A1Sensor fusion for thin film segmentationZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 3060US2025069958A1Dual beam systems and methods for decoupling the working distance of a charged particle beam device from focused ion beam geometry induced constraintsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 3160US2023087046A1Method for assessing the quality of a component of optical materialSCHOTT AG·Filed 2022·Application pending·0 cites
- 3259US12288706B2Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structuresZEISS CARL SMT GMBH·Filed 2022·Granted Apr 29, 2025·0 cites·16 claims
- 3359US10274828B2Lighting system of a microlithographic projection exposure system and method for operating such a lighting systemZEISS CARL SMT GMBH·Filed 2018·Granted Apr 30, 2019·0 cites·20 claims
- 3459US2025104963A1Beam angle rotation and sample rotationZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 3558US12056865B2Wafer-tilt determination for slice-and-image processZEISS CARL SMT GMBH·Filed 2021·Granted Aug 6, 2024·0 cites·25 claims
- 3658US2024331179A13d volume inspection of semiconductor wafers with increased accuracyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 3757US2025209603A1Computer implemented method for defect recognition in an imaging dataset of a wafer, corresponding computer readable-medium, computer program product and systems making use of such methodsZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 3857US2024311698A1Measurement method and apparatus for semiconductor features with increased throughputZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 3956US11436506B2Method and devices for determining metrology sitesZEISS CARL SMT GMBH·Filed 2020·Granted Sep 6, 2022·0 cites·27 claims
- 4056US9910359B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Mar 6, 2018·0 cites·27 claims
- 4156US2025021828A1Computer implemented method for the detection of anomalies in an imaging dataset of a wafer, and systems making use of such methodsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 4254US2024087134A1Segmentation or cross sections of high aspect ratio structuresZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4353US2023267627A1Transferring alignment information in 3d tomography from a first set of images to a second set of imagesZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4452US11728130B2Method of recording an image using a particle microscopeZEISS CARL SMT GMBH·Filed 2021·Granted Aug 15, 2023·0 cites·26 claims
- 4552US2023260105A1Defect detection for semiconductor structures on a waferZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4651US12288705B2FIB-SEM 3D tomography for measuring shape deviations of HAR structuresZEISS CARL SMT GMBH·Filed 2022·Granted Apr 29, 2025·0 cites·19 claims
- 4751US2024281952A13d volume inspection method and method of configuring of a 3d volume inspection methodZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4850US10061203B2Beam distributing optical device and associated unit, system and apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Aug 28, 2018·0 cites·20 claims
- 4948US10539883B2Illumination system of a microlithographic projection device and method for operating such a systemZEISS CARL SMT GMBH·Filed 2018·Granted Jan 21, 2020·0 cites·20 claims
- 5048US10012907B2Optical system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Jul 3, 2018·0 cites·15 claims
Showing the top 50 of 59 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →