Inventor · disambiguated record
Thomas Monz
Also filed as: MONZ THOMAS
1 granted patent·4 pending applications·0 citations·filing 2022–2024
6Inventor score
Top patents by PatentIndex Score
5 records- 0162US12405108B2Production method and measurement methodZEISS CARL SMT GMBH·Filed 2023·Granted Sep 2, 2025·0 cites·13 claims
- 0262US2024329285A1Method and apparatus for producing at least one hollow structure, mirror, euv lithography system, fluid feed apparatus and method for feeding a fluidZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0350US2024127981A1Device for controlling trapped ions with integrated waveguideINFINEON TECHNOLOGIES AUSTRIA AG·Filed 2023·Application pending·0 cites
- 0448US2023082054A1Device and method for controlling the temperature of elements in micro-lithographic projection exposure systemsZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 0547US2023176492A1Optical system and method of operating an optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →