Inventor · disambiguated record
Thomas Muelders
Also filed as: MUELDERS THOMAS
3 granted patents·7 pending applications·14 citations·filing 2005–2008
64Inventor score
Top patents by PatentIndex Score
10 records- 0183US7339652B2Apparatus for projecting a pattern into an image planeINFINEON TECHNOLOGIES AG·Filed 2006·Granted Mar 4, 2008·9 cites·22 claims
- 0271US7456933B2Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Granted Nov 25, 2008·3 cites·39 claims
- 0363US7855776B2Methods of compensating lens heating, lithographic projection system and photo maskQIMONDA AG·Filed 2008·Granted Dec 21, 2010·2 cites·25 claims
- 0439US2006132917A1Method for making an optical system with coated optical components and optical system made by the methodZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 0538US2007009816A1Method and system for photolithographyPFORR RAINER·Filed 2006·Application pending·0 cites
- 0636US2005243435A1Catadioptric reduction objective having a polarization beamsplitterZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 0736US2008008972A1Method for Automatically Generating at Least One of a Mask Layout and an Illumination Pixel Pattern of an Imaging SystemMUELDERS THOMAS·Filed 2007·Application pending·0 cites
- 0835US2006256313A1Photolithographic imaging device and apparatus for generating an illumination distributionRENNER KERSTIN·Filed 2006·Application pending·0 cites
- 0935US2007229790A1Arrangement for the transfer of structural elements of a photomask onto a substrate and method thereforKUECHLER BERND·Filed 2007·Application pending·0 cites
- 1034US2008010627A1Method for automatically generating at least one of a mask layout and an illumination pixel pattern of an imaging systemMUELDERS THOMAS·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →