Inventor · disambiguated record
Theodorus Wilhelmus Polet
Also filed as: POLET THEODORUS WILHELMUS
25 granted patents·1 pending application·22 citations·filing 2012–2023
92Inventor score
Top patents by PatentIndex Score
26 records- 0192US11231653B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 25, 2022·2 cites·20 claims
- 0289US9785055B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·7 cites·20 claims
- 0387US10416571B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 17, 2019·4 cites·20 claims
- 0487US10222707B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·3 cites·20 claims
- 0586US9915877B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Mar 13, 2018·3 cites·20 claims
- 0683US10969695B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 6, 2021·2 cites·20 claims
- 0782US12072636B2Fluid handling system and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Aug 27, 2024·1 cites·20 claims
- 0878US12242200B2Lithography apparatus and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 0977US11860546B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Jan 2, 2024·0 cites·20 claims
- 1075US11614689B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Mar 28, 2023·0 cites·20 claims
- 1171US11774857B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Oct 3, 2023·0 cites·20 claims
- 1270US11454892B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Sep 27, 2022·0 cites·20 claims
- 1369US11809086B2Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 7, 2023·0 cites·20 claims
- 1460US10571810B2Substrate table, a lithographic apparatus and a method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 1560US10481502B2Object holder and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·0 cites·20 claims
- 1658US11156921B2Fluid handling structure, lithographic apparatus, and method of using a fluid handling structureASML NETHERLANDS BV·Filed 2018·Granted Oct 26, 2021·0 cites·20 claims
- 1757US11029607B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jun 8, 2021·0 cites·20 claims
- 1855US11720032B2Process tool and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Aug 8, 2023·0 cites·20 claims
- 1955US11372336B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 28, 2022·0 cites·21 claims
- 2053US10317804B2Substrate table, lithographic apparatus and method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jun 11, 2019·0 cites·20 claims
- 2149US9274436B2Lithographic apparatus and a device manufacturing methodPOLET THEODORUS WILHELMUS·Filed 2012·Granted Mar 1, 2016·0 cites·21 claims
- 2248US11086239B2Cleaning device and method of cleaningASML NETHERLANDS BV·Filed 2019·Granted Aug 10, 2021·0 cites·20 claims
- 2347US10001712B2Immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 19, 2018·0 cites·20 claims
- 2441US11143969B2Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 12, 2021·0 cites·20 claims
- 2539US10324384B2Lithographic apparatus and a method of manufacturing a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jun 18, 2019·0 cites·20 claims
- 2634US2018196354A1A lithographic apparatus, a projection system, a last lens element, a liquid control member and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →