Inventor · disambiguated record
Thilo Pollak
Also filed as: POLLAK THILO
1 granted patent·6 pending applications·0 citations·filing 2021–2024
3Inventor score
Files withZEISS CARL SMT GMBH7
Top patents by PatentIndex Score
7 records- 0160US12411417B2Projection objective including an optical deviceZEISS CARL SMT GMBH·Filed 2023·Granted Sep 9, 2025·0 cites·20 claims
- 0260US2025110413A1Method for compensating actuator effects of actuatorsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0359US2024085783A1Optical device, method for adjusting a setpoint deformation and lithography systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0455US2024085800A1Projection exposure apparatus and method for designing a component of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0550US2025138302A1Optical assembly, projection exposure system for semiconductor lithography, and methodZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0644US2022206401A1Mirror assembly having a hydrogen barrier and optical assemblyZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 0735US2021255554A1Module for a projection exposure apparatus for semiconductor lithography with a semi-active spacer, and method for using the semi-active spacerZEISS CARL SMT GMBH·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →