Inventor · disambiguated record
Thorsten Schepers
Also filed as: SCHEPERS THORSTEN
1 granted patent·1 pending application·0 citations·filing 2010–2012
10Inventor score
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2 records- 0134US2014100806A1Method and apparatus for matching tools based on time trace dataGLOBALFOUNDRIES INC·Filed 2012·Application pending·0 cites
- 0232US8518720B2UV irradiance monitoring in semiconductor processing using a temperature dependent signalMAYER ULRICH·Filed 2010·Granted Aug 27, 2013·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →