Inventor · disambiguated record
Thomas J. Sonderman
Also filed as: SONDERMAN THOMAS · SONDERMAN THOMAS J
48 granted patents·2 pending applications·1,758 citations·filing 1999–2006
99Inventor score
Files withADVANCED MICRO DEVICES INC44GLOBALFOUNDRIES INC2ADVANCED MIRCO DEVICES INC1SONDERMAN THOMAS J1
Top patents by PatentIndex Score
50 records- 0198US6387823B1Method and apparatus for controlling deposition process using residual gas analysisADVANCED MICRO DEVICES INC·Filed 2000·Granted May 14, 2002·290 cites·13 claims
- 0296US6708075B2Method and apparatus for utilizing integrated metrology data as feed-forward dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 16, 2004·103 cites·22 claims
- 0396US6470230B1Supervisory method for determining optimal process targets based on product performance in microelectronic fabricationADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 22, 2002·119 cites·37 claims
- 0495US6751518B1Dynamic process state adjustment of a processing tool to reduce non-uniformityADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 15, 2004·85 cites·34 claims
- 0594US6917849B1Method and apparatus for predicting electrical parameters using measured and predicted fabrication parametersADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 12, 2005·75 cites·25 claims
- 0693US6678570B1Method and apparatus for determining output characteristics using tool state dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 13, 2004·79 cites·17 claims
- 0793US6465263B1Method and apparatus for implementing corrected species by monitoring specific state parametersADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 15, 2002·69 cites·17 claims
- 0892US6818561B1Control methodology using optical emission spectroscopy derived data, system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 16, 2004·58 cites·25 claims
- 0992US6449524B1Method and apparatus for using equipment state data for run-to-run control of manufacturing toolsADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 10, 2002·65 cites·29 claims
- 1091US6802045B1Method and apparatus for incorporating control simulation environmentADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 5, 2004·56 cites·31 claims
- 1188US6650955B1Method and apparatus for determining a sampling plan based on process and equipment fingerprintingADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·47 cites·37 claims
- 1288US6546508B1Method and apparatus for fault detection of a processing tool in an advanced process control (APC) frameworkADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 8, 2003·61 cites·23 claims
- 1387US7324865B1Run-to-run control method for automated control of metal deposition processesADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 29, 2008·28 cites·49 claims
- 1487US6444481B1Method and apparatus for controlling a plating processADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 3, 2002·36 cites·27 claims
- 1586US6961636B1Method and apparatus for dynamically monitoring controller tuning parametersADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 1, 2005·25 cites·38 claims
- 1685US7292959B1Total tool control for semiconductor manufacturingADVANCED MIRCO DEVICES INC·Filed 2006·Granted Nov 6, 2007·14 cites·39 claims
- 1785US6821792B1Method and apparatus for determining a sampling plan based on process and equipment state informationADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 23, 2004·32 cites·34 claims
- 1885US6454899B1Apparatus for filling trenchesADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 24, 2002·33 cites·11 claims
- 1984US6524774B1Method of controlling photoresist thickness based upon photoresist viscosityADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 25, 2003·23 cites·45 claims
- 2084US6284622B1Method for filling trenchesADVANCED MICRO DEVICES INC·Filed 1999·Granted Sep 4, 2001·61 cites·11 claims
- 2182US7103439B1Method and apparatus for initializing tool controllers based on tool event dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 5, 2006·19 cites·28 claims
- 2282US6745086B1Method and apparatus for determining control actions incorporating defectivity effectsADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 1, 2004·25 cites·38 claims
- 2382US6645780B1Method and apparatus for combining integrated and offline metrology for process controlADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 11, 2003·27 cites·12 claims
- 2481US7402257B1Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 22, 2008·25 cites·9 claims
- 2581US6615098B1Method and apparatus for controlling a tool using a baseline control scriptADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 2, 2003·30 cites·34 claims
- 2681US6511898B1Method for controlling deposition parameters based on polysilicon grain size feedbackADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 28, 2003·25 cites·10 claims
- 2780US6937914B1Method and apparatus for controlling process target values based on manufacturing metricsADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 30, 2005·16 cites·48 claims
- 2878US6834213B1Process control based upon a metrology delayADVANCED MICRO DEVICES INC·Filed 2003·Granted Dec 21, 2004·25 cites·29 claims
- 2978US6785586B1Method and apparatus for adaptively scheduling tool maintenanceADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 31, 2004·23 cites·23 claims
- 3078US6699727B1Method for prioritizing production lots based on grade estimates and output requirementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 2, 2004·21 cites·26 claims
- 3174US6650957B1Method and apparatus for run-to-run control of deposition processADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 18, 2003·19 cites·57 claims
- 3271US8017411B2Dynamic adaptive sampling rate for model predictionGLOBALFOUNDRIES INC·Filed 2002·Granted Sep 13, 2011·17 cites·24 claims
- 3371US6675058B1Method and apparatus for controlling the flow of wafers through a process flowADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 6, 2004·14 cites·19 claims
- 3470US8615314B1Process control using analysis of an upstream processSONDERMAN THOMAS J·Filed 2004·Granted Dec 24, 2013·11 cites·47 claims
- 3569US6801817B1Method and apparatus for integrating multiple process controllersADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 5, 2004·14 cites·58 claims
- 3668US6925347B1Process control based on an estimated process resultADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 2, 2005·13 cites·29 claims
- 3768US6901340B1Method and apparatus for distinguishing between sources of process variationADVANCED MICRO DEVICES INC·Filed 2001·Granted May 31, 2005·11 cites·29 claims
- 3868US6800562B1Method of controlling wafer charging effects due to manufacturing processesADVANCED MICRO DEVICES INC·Filed 2003·Granted Oct 5, 2004·11 cites·37 claims
- 3964US6970757B1Method and apparatus for updating control state variables of a process control model based on rework dataADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 29, 2005·10 cites·45 claims
- 4064US6850322B2Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnaceADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 1, 2005·9 cites·18 claims
- 4161US6773931B2Dynamic targeting for a process control systemADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 10, 2004·10 cites·27 claims
- 4257US6660539B1Methods for dynamically controlling etch endpoint time, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 9, 2003·5 cites·19 claims
- 4356US7117062B1Determining transmission of error effects for improving parametric performanceADVANCED MICRO DEVICES INC·Filed 2002·Granted Oct 3, 2006·5 cites·33 claims
- 4456US6617258B1Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 9, 2003·5 cites·20 claims
- 4550US7254453B2Secondary process controller for supplementing a primary process controllerADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 7, 2007·2 cites·36 claims
- 4646US7160740B2Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2003·Granted Jan 9, 2007·2 cites·11 claims
- 4738US8359494B2Parallel fault detectionGLOBALFOUNDRIES INC·Filed 2002·Granted Jan 22, 2013·0 cites·21 claims
- 4837US6258681B1Use of a rapid thermal anneal process to control drive currentADVANCED MICRO DEVICES INC·Filed 1999·Granted Jul 10, 2001·5 cites·39 claims
- 4935US2002192944A1Method and apparatus for controlling a thickness of a copper filmFiled 2001·Application pending·0 cites
- 5035US2002177245A1Method and apparatus for controlling feature critical dimensions based on scatterometry derived profileFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →