Inventor · disambiguated record
Thomas Tillocher
Also filed as: TILLOCHER THOMAS
4 granted patents·1 pending application·6 citations·filing 2008–2021
60Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0171US8012365B2Deep anisotropic silicon etch methodST MICROELECTRONICS SA·Filed 2008·Granted Sep 6, 2011·6 cites·7 claims
- 0255US12131914B2Selective etching with fluorine, oxygen and noble gas containing plasmasTOKYO ELECTRON LTD·Filed 2021·Granted Oct 29, 2024·0 cites·20 claims
- 0353US12249515B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 11, 2025·0 cites·16 claims
- 0447US11120999B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Sep 14, 2021·0 cites·7 claims
- 0535US2020395221A1Method of etching porous filmTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →