Inventor · disambiguated record
Timothy M. Ebel
Also filed as: EBEL TIMOTHY · EBEL TIMOTHY M
3 granted patents·272 citations·filing 1990–1998
78Inventor score
Top patents by PatentIndex Score
3 records- 0197US5647953APlasma cleaning method for removing residues in a plasma process chamberLAM RES CORP·Filed 1995·Granted Jul 15, 1997·189 cites·23 claims
- 0267US5145571AGold interconnect with sidewall-spacersBIPOLAR INTEGRATED TECHNOLOGY·Filed 1990·Granted Sep 8, 1992·41 cites·18 claims
- 0365US6235640B1Techniques for forming contact holes through to a silicon layer of a substrateLAM RES CORP·Filed 1998·Granted May 22, 2001·42 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →