Inventor · disambiguated record
Tiannan Guan
Also filed as: GUAN TIANNAN
4 granted patents·3 pending applications·4 citations·filing 2016–2021
59Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0181US10192772B2Substrate table and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·4 cites·20 claims
- 0257US12189309B2Clamp assemblyASML NETHERLANDS BV·Filed 2020·Granted Jan 7, 2025·0 cites·15 claims
- 0351US10451981B2Measurement substrate, a measurement method and a measurement systemASML NETHERLANDS BV·Filed 2017·Granted Oct 22, 2019·0 cites·20 claims
- 0443US2025021022A1Electrostatic holder, object table and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0538US2021263418A1Tool for modifying a support surfaceASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 0637US2020103770A1A system for cleaning a substrate support, a method of removing matter from a substrate support, and a lithographic apparatusASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 0729US10551182B2Proximity sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 4, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →