Inventor · disambiguated record
Timo Malinen
Also filed as: MALINEN TIMO
16 granted patents·2 pending applications·792 citations·filing 2003–2023
91Inventor score
Top patents by PatentIndex Score
18 records- 0198US9868131B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2015·Granted Jan 16, 2018·414 cites·11 claims
- 0297US9095869B2Atomic layer deposition with plasma sourceKILPI VAINO·Filed 2011·Granted Aug 4, 2015·360 cites·18 claims
- 0389US9745661B2Method and apparatus for forming a substrate web track in an atomic layer deposition reactorPICOSUN OY·Filed 2013·Granted Aug 29, 2017·4 cites·11 claims
- 0487US9869020B2Protecting a target pump interior with an ALD coatingPICOSUN OY·Filed 2013·Granted Jan 16, 2018·9 cites·16 claims
- 0578US10597778B2ALD method and apparatus including a photon sourcePICOSUN OY·Filed 2015·Granted Mar 24, 2020·1 cites·16 claims
- 0677US10329662B2Protecting an interior of a hollow body with an ALD coatingPICOSUN OY·Filed 2014·Granted Jun 25, 2019·2 cites·15 claims
- 0775US12110588B2Adjustable fluid inlet assembly for a substrate processing apparatus and methodPICOSUN OY·Filed 2022·Granted Oct 8, 2024·0 cites·15 claims
- 0874US10619241B2ALD method and apparatusPICOSUN OY·Filed 2015·Granted Apr 14, 2020·1 cites·16 claims
- 0972US11970774B2Method of operating a deposition or cleaning apparatusPICOSUN OY·Filed 2023·Granted Apr 30, 2024·0 cites·8 claims
- 1066US12297535B2Substrate processing methods and apparatusPICOSUN OY·Filed 2019·Granted May 13, 2025·0 cites·19 claims
- 1158US12383923B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2017·Granted Aug 12, 2025·0 cites·14 claims
- 1255US12325915B2Substrate processing apparatus and methodPICOSUN OY·Filed 2020·Granted Jun 10, 2025·0 cites·12 claims
- 1354US11505864B2Adjustable fluid inlet assembly for a substrate processing apparatus and methodPICOSUN OY·Filed 2017·Granted Nov 22, 2022·0 cites·15 claims
- 1452US11725279B2Deposition or cleaning apparatus with movable structurePICOSUN OY·Filed 2017·Granted Aug 15, 2023·0 cites·10 claims
- 1550US10494718B2Deposition reactor with plasma sourceKILPI VAINO·Filed 2011·Granted Dec 3, 2019·0 cites·15 claims
- 1648US2021087687A1Uniform depositionPICOSUN OY·Filed 2017·Application pending·0 cites
- 1742US7464436B2Central vacuum cleaner and its central unitKP TEKNO OY·Filed 2003·Granted Dec 16, 2008·1 cites·7 claims
- 1841US2019194809A1Apparatus and methods for atomic layer depositionPICOSUN OY·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →