Inventor · disambiguated record
Tilo Sielaff
Also filed as: SIELAFF TILO
1 granted patent·1 pending application·1 citations·filing 2021–2023
17Inventor score
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0173US11886126B2Apparatus and method for removing a single particulate from a substrateZEISS CARL SMT GMBH·Filed 2021·Granted Jan 30, 2024·1 cites·39 claims
- 0253US2023152089A1Method and device for determining an alignment of a photomask on a sample stage which is displaceable along at least one axis and rotatable about at least one axisZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →