Inventor · disambiguated record
Toshikazu Akimoto
Also filed as: AKIMOTO TOSHIKAZU
1 granted patent·4 pending applications·0 citations·filing 2013–2025
1Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0158US2025381641A1Polishing apparatus and substrate polishing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0251US2025174439A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0351US2024420970A1Liquid circulation system, substrate processing apparatus, and liquid circulation methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0450US12486575B2Apparatus for processing substrate, gas shower head, and method for processing substrateTOKYO ELECTRON LTD·Filed 2022·Granted Dec 2, 2025·0 cites·7 claims
- 0530US2015004721A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →