Inventor · disambiguated record
Toshiyuki Arakane
Also filed as: ARAKANE TOSHIYUKI
3 granted patents·2 pending applications·3 citations·filing 2018–2023
54Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0176US11462431B2Discharging method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 4, 2022·1 cites·12 claims
- 0273US10720313B2Measuring device, measurement method, and plasma processing deviceTOKYO ELECTRON LTD·Filed 2018·Granted Jul 21, 2020·2 cites·7 claims
- 0356US11658012B2Control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 23, 2023·0 cites·8 claims
- 0454US2024212996A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0543US2021035831A1Substrate position detecting method, substrate position adjusting method, and substrate position detecting apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Toshiyuki Arakane files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →