Inventor · disambiguated record
Tomoyuki Azuma
Also filed as: AZUMA TOMOYUKI
3 granted patents·5 pending applications·4 citations·filing 2004–2014
56Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0164US7767585B2Method of cleaning and process for producing semiconductor deviceSONY CORP·Filed 2006·Granted Aug 3, 2010·2 cites·7 claims
- 0251US2014283992A1Substrate processing apparatusMITSUBISHI GAS CHEMICAL CO·Filed 2014·Application pending·0 cites
- 0345US7670496B2Process for producing structural body and etchant for silicon oxide filmSONY CORP·Filed 2004·Granted Mar 2, 2010·2 cites·13 claims
- 0441US8765002B2Substrate processing apparatus and substrate processing methodAZUMA TOMOYUKI·Filed 2012·Granted Jul 1, 2014·0 cites·8 claims
- 0541US2009114619A1Wet etching method and wet etching apparatusMITSUBISHI GAS CHEMICAL CO·Filed 2006·Application pending·0 cites
- 0640US2008047577A1Substrate Cleaning Device and Cleaning Method ThereofGOTO HIDETO·Filed 2007·Application pending·0 cites
- 0737US2007175862A1Anisotropic etching agent composition used for manufacturing of micro-structures of silicon and etching methodYAMADA KENJI·Filed 2005·Application pending·0 cites
- 0832US2004221875A1Cleaning methodFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →