Inventor · disambiguated record
Tohru Azuma
Also filed as: Azuma Tohru
3 granted patents·9 citations·filing 2017–2023
61Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0191US11752515B2Coating apparatus and coating methodTOKYO ELECTRON LTD·Filed 2020·Granted Sep 12, 2023·4 cites·14 claims
- 0286US10643872B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted May 5, 2020·5 cites·10 claims
- 0373US12151255B2Coating apparatus and coating methodTOKYO ELECTRON LTD·Filed 2023·Granted Nov 26, 2024·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →