Inventor · disambiguated record
Toshiyasu Beppu
Also filed as: BEPPU TOSHIYASU
3 granted patents·43 citations·filing 1996–2002
68Inventor score
Top patents by PatentIndex Score
3 records- 0160US5860851APolishing apparatus and polishing method using the sameSUMITOMO METAL IND·Filed 1996·Granted Jan 19, 1999·24 cites·7 claims
- 0255US6439979B1Polishing apparatus and polishing method using the sameTOKYO ELECTRON LTD·Filed 1997·Granted Aug 27, 2002·19 cites·14 claims
- 0331US6800556B2Polishing method using ceria slurry, and method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2002·Granted Oct 5, 2004·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →