Inventor · disambiguated record
Toshiya Chiba
Also filed as: CHIBA TOSHIYA
2 granted patents·2 citations·filing 2018–2018
37Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0164US10763147B2Substrate warpage detection device, substrate warpage detection method, and substrate processing apparatus and substrate processing method using the sameTOKYO ELECTRON LTD·Filed 2018·Granted Sep 1, 2020·1 cites·20 claims
- 0263US10615066B2Substrate warping monitoring device and substrate processing apparatus using the same, and substrate warping monitoring methodTOKYO ELECTRON LTD·Filed 2018·Granted Apr 7, 2020·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →