Inventor · disambiguated record
Toshinobu Chiba
Also filed as: CHIBA TOSHINOBU
1 granted patent·1 pending application·7 citations·filing 2009–2009
29Inventor score
Technology areasC23C
Top patents by PatentIndex Score
2 records- 0170US8137519B2Sputtering cathode, sputtering apparatus provided with sputtering cathode, film-forming method, and method for manufacturing electronic deviceITAGAKI KATSUNORI·Filed 2009·Granted Mar 20, 2012·7 cites·6 claims
- 0247US2010078313A1Sputtering apparatus and method of thin film formationCANON ANELVA CORP·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →