Inventor · disambiguated record
Tongtong Guo
Also filed as: GUO TONGTONG
0 granted patents·4 pending applications·0 citations·filing 2021–2023
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0153US2025132127A1Transformer coupled plasma source design for thin dielectric film depositionLAM RES CORP·Filed 2022·Application pending·0 cites
- 0250US2025226227A1Deposition of metal-containing films and chamber cleanLAM RES CORP·Filed 2023·Application pending·0 cites
- 0348US2023223238A1Increasing plasma uniformity in a receptacleLAM RES CORP·Filed 2021·Application pending·0 cites
- 0441US2025022696A1Apparatuses and techniques for cleaning a multi-station semiconductor processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →