Inventor · disambiguated record
Toshihiko Hanamachi
Also filed as: HANAMACHI TOSHIHIKO
19 granted patents·6 pending applications·455 citations·filing 1998–2021
93Inventor score
Top patents by PatentIndex Score
25 records- 0197US6159301ASubstrate holding apparatus for processing semiconductorASM JAPAN·Filed 1998·Granted Dec 12, 2000·303 cites·7 claims
- 0286US6376808B2Heating apparatusNHK SPRING CO LTD·Filed 2001·Granted Apr 23, 2002·41 cites·7 claims
- 0382US7372001B2Ceramics heaterNHK SPRING CO LTD·Filed 2002·Granted May 13, 2008·31 cites·6 claims
- 0476US7241346B2Apparatus for vapor depositionNHK SPRING CO LTD·Filed 2003·Granted Jul 10, 2007·16 cites·13 claims
- 0575US10279441B2Method of manufacturing plate with passage, plate with passage, temperature adjustment plate, cold plate, and shower plateHANAMACHI TOSHIHIKO·Filed 2011·Granted May 7, 2019·5 cites·6 claims
- 0675US6687113B2Electrostatic chuckNHK SPRING CO LTD·Filed 2001·Granted Feb 3, 2004·19 cites·2 claims
- 0774US12247296B2Member for plasma processing deviceNHK SPRING CO LTD·Filed 2019·Granted Mar 11, 2025·1 cites·7 claims
- 0873US11477858B2Sheath heaterNHK SPRING CO LTD·Filed 2019·Granted Oct 18, 2022·2 cites·4 claims
- 0969US9162251B2Lamination and method for manufacturing laminationHIRANO SATOSHI·Filed 2012·Granted Oct 20, 2015·4 cites·6 claims
- 1064US10462850B2Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heaterHIRANO SATOSHI·Filed 2011·Granted Oct 29, 2019·1 cites·9 claims
- 1161US6535371B1Layered ceramic/metallic assembly, and an electrostatic chuck using such an assemblyFiled 1999·Granted Mar 18, 2003·32 cites·15 claims
- 1254US12338852B2Joined bodyNHK SPRING CO LTD·Filed 2019·Granted Jun 24, 2025·0 cites·2 claims
- 1350US2022009022A1Joining method and joined bodyNHK SPRING CO LTD·Filed 2019·Application pending·0 cites
- 1449US10290529B2Heater unitNHK SPRING CO LTD·Filed 2018·Granted May 14, 2019·0 cites·12 claims
- 1547US2014069700A1Lamination, conductive material, and method for manufacturing laminationHIRANO SATOSHI·Filed 2012·Application pending·0 cites
- 1646US12284731B2Heater and stage having the heaterNHK SPRING CO LTD·Filed 2021·Granted Apr 22, 2025·0 cites·15 claims
- 1746US12211710B2Stage, film-forming apparatus, and film-processing apparatusNHK SPRING CO LTD·Filed 2021·Granted Jan 28, 2025·0 cites·18 claims
- 1845US11201040B2Substrate supporting unit and film forming device having the substrate supporting unitNHK SPRING CO LTD·Filed 2019·Granted Dec 14, 2021·0 cites·10 claims
- 1942US11490464B2Heater unitNHK SPRING CO LTD·Filed 2019·Granted Nov 1, 2022·0 cites·10 claims
- 2037US2013106233A1Squirrel-cage rotor and manufacturing method of squirrel-cage rotorHANAMACHI TOSHIHIKO·Filed 2011·Application pending·0 cites
- 2136US10276410B2Substrate support deviceNHK SPRING CO LTD·Filed 2012·Granted Apr 30, 2019·0 cites·14 claims
- 2236US9551071B2Substrate support deviceNHK SPRING CO LTD·Filed 2015·Granted Jan 24, 2017·0 cites·13 claims
- 2335US2001029895A1Ceramic heater device and film forming device using the sameNHK SPRING CO LTD·Filed 2001·Application pending·0 cites
- 2434US2022026151A1Plate with flow channelNHK SPRING CO LTD·Filed 2019·Application pending·0 cites
- 2534US2014134448A1Laminated body and method of manufacturing laminated bodyYAMAUCHI YUICHIRO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →