Inventor · disambiguated record
Tokutarou Hayashi
Also filed as: HAYASHI TOKUTAROU
13 granted patents·1 pending application·54 citations·filing 2007–2021
89Inventor score
Top patents by PatentIndex Score
14 records- 0186US8055376B2Substrate processing system, substrate placing position adjusting method and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Nov 8, 2011·13 cites·20 claims
- 0283US7884622B2Method of adjusting moving position of transfer arm and position detecting jigTOKYO ELECTRON LTD·Filed 2008·Granted Feb 8, 2011·11 cites·7 claims
- 0382US10879100B2Substrate transfer device, substrate transfer method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Dec 29, 2020·4 cites·10 claims
- 0481US9136150B2Substrate processing apparatus, substrate processing method and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Sep 15, 2015·6 cites·5 claims
- 0581US8781787B2Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying methodHAYASHI TOKUTAROU·Filed 2011·Granted Jul 15, 2014·9 cites·20 claims
- 0672US9507349B2Substrate transfer apparatus, substrate transfer method, and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Nov 29, 2016·3 cites·20 claims
- 0767US8433436B2Substrate processing system, substrate placing position adjusting method and storage mediumDOKI YUICHI·Filed 2011·Granted Apr 30, 2013·3 cites·16 claims
- 0866US9299599B2Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer positionTOKYO ELECTRON LTD·Filed 2014·Granted Mar 29, 2016·1 cites·4 claims
- 0965US8755935B2Substrate holder positioning method and substrate processing systemDOUKI YUICHI·Filed 2012·Granted Jun 17, 2014·2 cites·12 claims
- 1061US9268327B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Feb 23, 2016·1 cites·24 claims
- 1157US9240337B2Substrate transport method, substrate transport apparatus, and coating and developing systemHAYASHI TOKUTAROU·Filed 2012·Granted Jan 19, 2016·1 cites·13 claims
- 1252US12074048B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Aug 27, 2024·0 cites·14 claims
- 1345US10256127B2Substrate transfer apparatus, substrate transfer method, and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Apr 9, 2019·0 cites·13 claims
- 1442US2023086738A1Bonding apparatus and bonding methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →