Inventor · disambiguated record
Tobias Hegele
Also filed as: HEGELE TOBIAS
1 granted patent·3 pending applications·0 citations·filing 2021–2025
8Inventor score
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0164US2025383598A1Mask inspection device and method for adjusting a mask inspection deviceZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0252US2025306479A1Optical system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0352US2025208523A1Bipod, optical system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0440US12038695B2Protection device for lines in a projection printing installation for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2021·Granted Jul 16, 2024·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →