Inventor · disambiguated record
Toshifumi Honda
Also filed as: HONDA TOSHIFUMI
113 granted patents·20 pending applications·732 citations·filing 1997–2024
99Inventor score
Top patents by PatentIndex Score
133 records- 0195US8452076B2Defect classifier using classification recipe based on connection between rule-based and example-based classifiersNAKAGAKI RYO·Filed 2012·Granted May 28, 2013·20 cites·4 claims
- 0295US7598490B2SEM-type reviewing apparatus and a method for reviewing defects using the sameHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 6, 2009·29 cites·21 claims
- 0394US9778206B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 3, 2017·16 cites·8 claims
- 0494US7170593B2Method of reviewing detected defectsHITACHI LTD·Filed 2005·Granted Jan 30, 2007·25 cites·9 claims
- 0592US8922764B2Defect inspection method and defect inspection apparatusURANO YUTA·Filed 2011·Granted Dec 30, 2014·12 cites·12 claims
- 0692US8461527B2Scanning electron microscope and method for processing an image obtained by the scanning electron microscopeNAKAHIRA KENJI·Filed 2012·Granted Jun 11, 2013·10 cites·12 claims
- 0792US7449898B2Method and apparatus for reviewing defects by detecting images having voltage contrastHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 11, 2008·14 cites·14 claims
- 0891US9568439B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2016·Granted Feb 14, 2017·3 cites·16 claims
- 0991US9436990B2Defect observation method and device thereforHITACHI HIGH TECH CORP·Filed 2012·Granted Sep 6, 2016·15 cites·18 claims
- 1091US7873202B2Method and apparatus for reviewing defects of semiconductor deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 18, 2011·12 cites·11 claims
- 1190US9678021B2Method and apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2015·Granted Jun 13, 2017·4 cites·10 claims
- 1290US8150141B2Defect classifier using classification recipe based on connection between rule-based and example-based classifiersNAKAGAKI RYO·Filed 2011·Granted Apr 3, 2012·10 cites·6 claims
- 1389US11143600B2Defect inspection deviceHITACHI HIGH TECH CORP·Filed 2018·Granted Oct 12, 2021·6 cites·10 claims
- 1489US9976966B2Defect inspection method and its deviceHITACHI HIGH TECH CORP·Filed 2016·Granted May 22, 2018·3 cites·4 claims
- 1588US10401300B2Defect observation method and device and defect detection deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Sep 3, 2019·4 cites·8 claims
- 1688US9645094B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2016·Granted May 9, 2017·2 cites·4 claims
- 1788US7991217B2Defect classifier using classification recipe based on connection between rule-based and example-based classifiersHITACHI HIGH TECH CORP·Filed 2007·Granted Aug 2, 2011·15 cites·6 claims
- 1888US7764826B2Method and apparatus of reviewing defects on a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 27, 2010·10 cites·14 claims
- 1987US10861145B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2016·Granted Dec 8, 2020·4 cites·9 claims
- 2087US9310318B2Defect inspection method and defect inspection deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Apr 12, 2016·3 cites·10 claims
- 2187US9075026B2Defect inspection device and defect inspection methodURANO TAKAHIRO·Filed 2010·Granted Jul 7, 2015·11 cites·20 claims
- 2287US8581976B2Method and apparatus for reviewing defects of semiconductor deviceKURIHARA MASAKI·Filed 2011·Granted Nov 12, 2013·7 cites·3 claims
- 2387US7834317B2Scanning electron microscope and system for inspecting semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Nov 16, 2010·10 cites·15 claims
- 2487US7734082B2Defect inspection methodHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 8, 2010·14 cites·8 claims
- 2586US10830706B2Defect inspection apparatus and defect inspection methodHITACHI HIGH TECH CORP·Filed 2018·Granted Nov 10, 2020·2 cites·16 claims
- 2686US10642164B2Defect detection device and defect observation deviceHITACHI HIGH TECH CORP·Filed 2017·Granted May 5, 2020·3 cites·8 claims
- 2786US8599369B2Defect inspection device and inspection methodURANO YUTA·Filed 2010·Granted Dec 3, 2013·6 cites·15 claims
- 2886US7075077B2Method of observing a specimen using a scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 11, 2006·23 cites·7 claims
- 2985US9329137B2Defect inspection method and device using sameHITACHI HIGH TECH CORP·Filed 2014·Granted May 3, 2016·4 cites·12 claims
- 3085US8853628B2Defect inspection method, and device thereofHOSOYA NAOKI·Filed 2011·Granted Oct 7, 2014·8 cites·10 claims
- 3185US7903867B2Method and apparatus for displaying detected defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 8, 2011·8 cites·8 claims
- 3285US7626163B2Defect review method and device for semiconductor deviceHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 1, 2009·13 cites·16 claims
- 3385US7601954B2Method and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 13, 2009·10 cites·16 claims
- 3485US7598491B2Observing method and its apparatus using electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 6, 2009·9 cites·15 claims
- 3585US7205555B2Defect inspection apparatus and defect inspection methodHITACHI LTD·Filed 2005·Granted Apr 17, 2007·8 cites·11 claims
- 3684US9390490B2Method and device for testing defect using SEMTAKAGI YUJI·Filed 2010·Granted Jul 12, 2016·7 cites·5 claims
- 3783US9865046B2Defect inspection method and defect inspection deviceHITACHI HIGH TECH CORP·Filed 2013·Granted Jan 9, 2018·7 cites·6 claims
- 3883US9733194B2Method for reviewing a defect and apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Aug 15, 2017·2 cites·15 claims
- 3983US9506876B2X-ray inspection device, inspection method, and X-ray detectorHITACHI HIGH TECH CORP·Filed 2012·Granted Nov 29, 2016·4 cites·12 claims
- 4083US8670116B2Method and device for inspecting for defectsNAKAO TOSHIYUKI·Filed 2011·Granted Mar 11, 2014·6 cites·16 claims
- 4183US7656171B2Method and apparatus for reviewing defects by detecting images having voltage contrastHITACHI HIGH TECH CORP·Filed 2008·Granted Feb 2, 2010·5 cites·10 claims
- 4282US9683946B2Method and device for detecting defects and method and device for observing defectsHITACHI HIGH TECH CORP·Filed 2013·Granted Jun 20, 2017·4 cites·6 claims
- 4381US10228332B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 12, 2019·2 cites·14 claims
- 4481US9513228B2Defect inspection method and its deviceHITACHI HIGH TECH CORP·Filed 2012·Granted Dec 6, 2016·3 cites·20 claims
- 4581US8804110B2Fault inspection device and fault inspection methodURANO YUTA·Filed 2011·Granted Aug 12, 2014·4 cites·8 claims
- 4681US8106357B2Scanning electron microscope and method for processing an image obtained by the scanning electron microscopeNAKAHIRA KENJI·Filed 2008·Granted Jan 31, 2012·5 cites·11 claims
- 4781US6855930B2Defect inspection apparatus and defect inspection methodHITACHI LTD·Filed 2002·Granted Feb 15, 2005·26 cites·9 claims
- 4880US9523648B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2013·Granted Dec 20, 2016·3 cites·8 claims
- 4980US8975582B2Method and apparatus for reviewing defectsNISHIYAMA HIDETOSHI·Filed 2011·Granted Mar 10, 2015·3 cites·29 claims
- 5080US8547429B2Apparatus and method for monitoring semiconductor device manufacturing processHONDA TOSHIFUMI·Filed 2009·Granted Oct 1, 2013·7 cites·20 claims
Showing the top 50 of 133 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →