Inventor · disambiguated record
Tony Keeton
Also filed as: KEETON TONY · KEETON TONY J
8 granted patents·4 pending applications·513 citations·filing 2002–2013
90Inventor score
Top patents by PatentIndex Score
12 records- 0197US6776849B2Wafer holder with peripheral lift ringASM INC·Filed 2002·Granted Aug 17, 2004·324 cites·36 claims
- 0295US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 0390US7070660B2Wafer holder with stiffening ribASM INC·Filed 2002·Granted Jul 4, 2006·51 cites·24 claims
- 0486US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 0580US7449071B2Wafer holder with peripheral lift ringASM INC·Filed 2004·Granted Nov 11, 2008·20 cites·16 claims
- 0678US7033445B2Gridded susceptorASM INC·Filed 2002·Granted Apr 25, 2006·29 cites·10 claims
- 0773US6879777B2Localized heating of substrates using opticsASM INC·Filed 2002·Granted Apr 12, 2005·16 cites·21 claims
- 0869US6861321B2Method of loading a wafer onto a wafer holder to reduce thermal shockASM INC·Filed 2002·Granted Mar 1, 2005·14 cites·28 claims
- 0946US2014058176A1Methane conversion apparatus and process using a supersonic flow reactorUOP LLC·Filed 2013·Application pending·0 cites
- 1046US2014058169A1Methane conversion apparatus and process using a supersonic flow reactorUOP LLC·Filed 2013·Application pending·0 cites
- 1138US2005176252A1Two-stage load for processing both sides of a waferFiled 2004·Application pending·0 cites
- 1236US2005092439A1Low/high temperature substrate holder to reduce edge rolloff and backside damageFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →