Inventor · disambiguated record
Tom Kirschenheiter
Also filed as: KIRSCHENHEITER TOM
4 granted patents·449 citations·filing 2014–2022
74Inventor score
Files withASM IP HOLDING BV4
Top patents by PatentIndex Score
4 records- 0194US10167557B2Gas distribution system, reactor including the system, and methods of using the sameASM IP HOLDING BV·Filed 2014·Granted Jan 1, 2019·446 cites·17 claims
- 0287US10604847B2Gas distribution system, reactor including the system, and methods of using the sameASM IP HOLDING BV·Filed 2018·Granted Mar 31, 2020·3 cites·6 claims
- 0375US12043899B2Reactor system and method to reduce residue buildup during a film deposition processASM IP HOLDING BV·Filed 2022·Granted Jul 23, 2024·0 cites·18 claims
- 0463US11390950B2Reactor system and method to reduce residue buildup during a film deposition processASM IP HOLDING BV·Filed 2017·Granted Jul 19, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →