Inventor · disambiguated record
Toshihiro Kitao
Also filed as: KITAO TOSHIHIRO
4 granted patents·4 pending applications·5 citations·filing 2020–2024
61Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0192US11869756B2Virtual metrology enhanced plasma process optimization methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·3 cites·20 claims
- 0285US12112107B2Virtual metrology for wafer result predictionTOKYO ELECTRON LTD·Filed 2020·Granted Oct 8, 2024·2 cites·12 claims
- 0360US2025013213A1Analysis apparatus, substrate processing system, substrate processing apparatus, analysis method, and analysis programTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0457US2024420359A1Profile detecting method and profile detecting apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0553US12300477B2Autonomous operation of plasma processing toolTOKYO ELECTRON LTD·Filed 2022·Granted May 13, 2025·0 cites·19 claims
- 0651US2023360190A1Profile detection method, profile detection program, and information processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0749US11669079B2Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancementsTOKYO ELECTRON LTD·Filed 2021·Granted Jun 6, 2023·0 cites·21 claims
- 0843US2021073651A1Model generating method and model generating apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →