Inventor · disambiguated record

Tom Laidig

Also filed as: LAIDIG TOM

3 granted patents·350 citations·filing 1998–2001

78Inventor score

Technology areasG03F

Files withASML MASKTOOLS BV3

Top patents by PatentIndex Score

3 records

0196US6114071AMethod of fine feature edge tuning with optically-halftoned maskASML MASKTOOLS BV·Filed 1998·Granted Sep 5, 2000·285 cites·9 claims
0283US6482555B2Method of patterning sub-0.25λ line features with high transmission, “attenuated” phase shift masksASML MASKTOOLS BV·Filed 2001·Granted Nov 19, 2002·21 cites·28 claims
0382US6312854B1Method of patterning sub-0.25 lambda line features with high transmission, “attenuated” phase shift masksASML MASKTOOLS BV·Filed 1999·Granted Nov 6, 2001·44 cites·32 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →