Inventor · disambiguated record
Tony Luong
Also filed as: LUONG TONY
6 granted patents·1 pending application·61 citations·filing 2001–2004
82Inventor score
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0181US6896586B2Method and apparatus for heating polishing padLAM RES CORP·Filed 2002·Granted May 24, 2005·26 cites·16 claims
- 0273US6896600B1Liquid dispense manifold for chemical-mechanical polisherLAM RES CORP·Filed 2002·Granted May 24, 2005·16 cites·11 claims
- 0362US6712670B2Method and apparatus for applying downward force on wafer during CMPLAM RES CORP·Filed 2001·Granted Mar 30, 2004·7 cites·10 claims
- 0458US6666755B1Belt wiper for a chemical mechanical planarization systemLAM RES CORP·Filed 2002·Granted Dec 23, 2003·9 cites·18 claims
- 0549US6761626B2Air platen for leading edge and trailing edge controlLAM RES CORP·Filed 2001·Granted Jul 13, 2004·3 cites·11 claims
- 0641US7018276B2Air platen for leading edge and trailing edge controlLAM RES CORP·Filed 2004·Granted Mar 28, 2006·0 cites·15 claims
- 0740US2004161939A1Method and apparatus for applying downward force on wafer during CMPLAM RES CORP·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Tony Luong files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →