Inventor · disambiguated record
Tobias Meisch
Also filed as: MEISCH TOBIAS
1 granted patent·1 pending application·0 citations·filing 2021–2024
9Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0158US2024411234A1Method for machining a workpieceZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0256US12111578B2Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirrorZEISS CARL SMT GMBH·Filed 2021·Granted Oct 8, 2024·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →