Inventor · disambiguated record
Toshihiro Morisawa
Also filed as: MORISAWA TOSHIHIRO
10 granted patents·4 pending applications·74 citations·filing 2005–2025
87Inventor score
Files withHITACHI LTD6MORISAWA TOSHIHIRO4HITACHI CABLE1HITACHI GLOBAL STORAGE TECH NL1HITACHI HIGH TECH CORP1
Top patents by PatentIndex Score
14 records- 0191US7070477B2Method of polishing semiconductor waferHITACHI LTD·Filed 2005·Granted Jul 4, 2006·30 cites·8 claims
- 0289US9110461B2Semiconductor manufacturing equipmentMORISAWA TOSHIHIRO·Filed 2012·Granted Aug 18, 2015·13 cites·14 claims
- 0383US8992721B2Plasma processing apparatusKAGOSHIMA AKIRA·Filed 2010·Granted Mar 31, 2015·7 cites·9 claims
- 0479US8924001B2Etching apparatus, control simulator, and semiconductor device manufacturing methodMORISAWA TOSHIHIRO·Filed 2010·Granted Dec 30, 2014·5 cites·21 claims
- 0575US11062274B2Maintenance planning apparatus and maintenance planning methodHITACHI LTD·Filed 2018·Granted Jul 13, 2021·1 cites·14 claims
- 0674US8486290B2Etching apparatus, analysis apparatus, etching treatment method, and etching treatment programMORISAWA TOSHIHIRO·Filed 2009·Granted Jul 16, 2013·5 cites·13 claims
- 0773US7809459B2Advanced-process-control system utilizing a lambda tunerHITACHI GLOBAL STORAGE TECH NL·Filed 2007·Granted Oct 5, 2010·8 cites·16 claims
- 0868US8282849B2Etching process state judgment method and system thereforMORISAWA TOSHIHIRO·Filed 2009·Granted Oct 9, 2012·3 cites·9 claims
- 0964US8367431B2Manufacturing method of semiconductor photonic device substrateHITACHI CABLE·Filed 2010·Granted Feb 5, 2013·2 cites·7 claims
- 1064US2025370441A1Process planning deviceHITACHI LTD·Filed 2025·Application pending·0 cites
- 1157US10262840B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2014·Granted Apr 16, 2019·0 cites·5 claims
- 1248US2020020003A1Component ordering mode selection device, component ordering mode selection method, and programHITACHI LTD·Filed 2017·Application pending·0 cites
- 1347US2020371513A1Maintenance Process Flow Generation Device and Maintenance Process Flow Generation MethodHITACHI LTD·Filed 2020·Application pending·0 cites
- 1444US2017357925A1Production Plan Making Assistance Apparatus and Production Plan Making Assistance MethodHITACHI LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →