Inventor · disambiguated record
Tomohiko Muta
Also filed as: MUTA TOMOHIKO
3 granted patents·1 citations·filing 2015–2020
45Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0175US12261064B2Tank, substrate processing apparatus, and method of using the tankTOKYO ELECTRON LTD·Filed 2020·Granted Mar 25, 2025·1 cites·11 claims
- 0239US10655619B2Pump, pump device, and liquid supply systemTOKYO ELECTRON LTD·Filed 2015·Granted May 19, 2020·0 cites·7 claims
- 0337US12094737B2Substrate processing apparatus, control method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Sep 17, 2024·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →