Inventor · disambiguated record
Toshihiko Nakata
Also filed as: NAKATA TOSHIHIKO
106 granted patents·9 pending applications·2,060 citations·filing 1984–2014
99Inventor score
Top patents by PatentIndex Score
115 records- 0198US6621571B1Method and apparatus for inspecting defects in a patterned specimenHITACHI LTD·Filed 2000·Granted Sep 16, 2003·149 cites·30 claims
- 0297US7528942B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2006·Granted May 5, 2009·32 cites·8 claims
- 0396US6943086B2Laser annealing apparatus, TFT device and annealing method of the sameHITACHI LTD·Filed 2002·Granted Sep 13, 2005·82 cites·32 claims
- 0496US6556290B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2001·Granted Apr 29, 2003·75 cites·38 claims
- 0595US7217573B1Method of inspecting a DNA chipHITACHI LTD·Filed 2000·Granted May 15, 2007·66 cites·37 claims
- 0694US4668089AExposure apparatus and method of aligning exposure mask with workpieceHITACHI LTD·Filed 1984·Granted May 26, 1987·85 cites·22 claims
- 0792US8013989B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2010·Granted Sep 6, 2011·7 cites·16 claims
- 0892US5656811AMethod for making specimen and apparatus thereofHITACHI LTD·Filed 1995·Granted Aug 12, 1997·138 cites·27 claims
- 0991US5046847AMethod for detecting foreign matter and device for realizing sameHITACHI LTD·Filed 1988·Granted Sep 10, 1991·100 cites·33 claims
- 1090US8634069B2Defect inspection device and defect inspection methodNAKANO HIROYUKI·Filed 2009·Granted Jan 21, 2014·16 cites·15 claims
- 1190US8353060B2Scanning probe microscope and a measuring method using the sameHITACHI LTD·Filed 2010·Granted Jan 8, 2013·10 cites·17 claims
- 1289US7326623B2Method of manufacturing display deviceHITACHI LTD·Filed 2005·Granted Feb 5, 2008·11 cites·17 claims
- 1389US7067806B2Scanning probe microscope and specimen observation methodHITACHI LTD·Filed 2005·Granted Jun 27, 2006·9 cites·8 claims
- 1489US5479259AMethod and apparatus for detecting photoacoustic signalHITACHI LTD·Filed 1992·Granted Dec 26, 1995·76 cites·21 claims
- 1589US5333495AMethod and apparatus for processing a minute portion of a specimenHITACHI LTD·Filed 1993·Granted Aug 2, 1994·76 cites·8 claims
- 1688US7834353B2Method of manufacturing display deviceHITACHI DISPLAYS LTD·Filed 2008·Granted Nov 16, 2010·9 cites·4 claims
- 1788US6897956B2Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor deviceHITACHI HIGH TECH ELECT ENG CO·Filed 2002·Granted May 24, 2005·37 cites·21 claims
- 1888US6576559B2Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatusesHITACHI LTD·Filed 2002·Granted Jun 10, 2003·32 cites·22 claims
- 1988US5377006AMethod and apparatus for detecting photoacoustic signalHITACHI LTD·Filed 1992·Granted Dec 27, 1994·76 cites·32 claims
- 2087US7456963B2Method and equipment for detecting pattern defectHITACHI LTD·Filed 2006·Granted Nov 25, 2008·7 cites·6 claims
- 2187US7417721B2Defect detector and defect detecting methodHITACHI LTD·Filed 2003·Granted Aug 26, 2008·20 cites·21 claims
- 2287US6800859B1Method and equipment for detecting pattern defectHITACHI LTD·Filed 1999·Granted Oct 5, 2004·55 cites·27 claims
- 2386US8107065B2Method and apparatus for detecting defectsNAKANO HIROYUKI·Filed 2010·Granted Jan 31, 2012·4 cites·8 claims
- 2486US8011230B2Scanning probe microscopeHITACHI LTD·Filed 2008·Granted Sep 6, 2011·10 cites·11 claims
- 2586US5214282AMethod and apparatus for processing a minute portion of a specimenHITACHI LTD·Filed 1991·Granted May 25, 1993·58 cites·69 claims
- 2685US7791725B2Method and equipment for detecting pattern defectHITACHI LTD·Filed 2008·Granted Sep 7, 2010·5 cites·10 claims
- 2785US7631548B2Scanning probe microscopeHITACHI LTD·Filed 2007·Granted Dec 15, 2009·10 cites·20 claims
- 2885US7218389B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2002·Granted May 15, 2007·24 cites·12 claims
- 2985US6825437B2Apparatus enabling particle detection utilizing wide view lensHITACHI LTD·Filed 2002·Granted Nov 30, 2004·22 cites·31 claims
- 3084US7129124B2Display device, process of fabricating same, and apparatus for fabricating sameHITACHI DISPLAYS LTD·Filed 2003·Granted Oct 31, 2006·26 cites·6 claims
- 3184US5781294AMethod and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimenHITACHI LTD·Filed 1995·Granted Jul 14, 1998·77 cites·25 claims
- 3283US8670116B2Method and device for inspecting for defectsNAKAO TOSHIYUKI·Filed 2011·Granted Mar 11, 2014·6 cites·16 claims
- 3382US8181268B2Scanning probe microscope and method of observing sample using the sameNAKATA TOSHIHIKO·Filed 2008·Granted May 15, 2012·6 cites·20 claims
- 3482US7966867B2Scanning probe microscopeHITACHI LTD·Filed 2008·Granted Jun 28, 2011·8 cites·13 claims
- 3582US6831737B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2002·Granted Dec 14, 2004·14 cites·24 claims
- 3682US5136172AMethod and apparatus for detecting photoacoustic signalHITACHI LTD·Filed 1990·Granted Aug 4, 1992·61 cites·13 claims
- 3781US6943876B2Method and apparatus for detecting pattern defectsHITACHI LTD·Filed 2002·Granted Sep 13, 2005·17 cites·15 claims
- 3881US6721047B2Method and apparatus for inspecting defects of a specimenHITACHI LTD·Filed 2001·Granted Apr 13, 2004·18 cites·17 claims
- 3980US8508727B2Defects inspecting apparatus and defects inspecting methodUTO SACHIO·Filed 2012·Granted Aug 13, 2013·2 cites·18 claims
- 4080US8361784B2Method of inspecting a DNA chip and apparatus thereofHITACHI LTD·Filed 2007·Granted Jan 29, 2013·9 cites·4 claims
- 4180US7081953B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2004·Granted Jul 25, 2006·11 cites·10 claims
- 4280US6778272B2Method of processing a semiconductor deviceRENESAS TECH CORP·Filed 2001·Granted Aug 17, 2004·19 cites·20 claims
- 4380US6613588B2Floating particle inspection method and its apparatus and a semiconductor device processing apparatusHITACHI LTD·Filed 2001·Granted Sep 2, 2003·14 cites·12 claims
- 4479US8407811B2Scanning probe microscope and method of observing sample using the sameNAKATA TOSHIHIKO·Filed 2010·Granted Mar 26, 2013·4 cites·16 claims
- 4579US6819416B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2002·Granted Nov 16, 2004·12 cites·22 claims
- 4679US5083869APhotocoustic signal detecting deviceHITACHI LTD·Filed 1989·Granted Jan 28, 1992·41 cites·14 claims
- 4778US7911601B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2008·Granted Mar 22, 2011·3 cites·8 claims
- 4878US7768634B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·3 cites·16 claims
- 4978US7751037B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2009·Granted Jul 6, 2010·3 cites·7 claims
- 5078US7716970B2Scanning probe microscope and sample observation method using the sameHITACHI LTD·Filed 2006·Granted May 18, 2010·6 cites·16 claims
Showing the top 50 of 115 patent records by PatentIndex Score.
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