Inventor · disambiguated record
Toshiyuki Nakatsubo
Also filed as: NAKATSUBO TOSHIYUKI
4 granted patents·3 pending applications·0 citations·filing 2013–2021
52Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0151US11664201B2Substrate holding mechanism and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted May 30, 2023·0 cites·20 claims
- 0250US2013180452A1Film deposition apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0347US2022223463A1Deposition apparatus and deposition methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0445US11118267B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Sep 14, 2021·0 cites·8 claims
- 0543US11136669B2Film formation apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 5, 2021·0 cites·9 claims
- 0641US2014199856A1Method of depositing a film and film deposition apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0733US9601318B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Mar 21, 2017·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →