Inventor · disambiguated record
Tomohiro Ohta
Also filed as: OHTA TOMOHIRO
30 granted patents·6 pending applications·1,273 citations·filing 1990–2023
98Inventor score
Top patents by PatentIndex Score
36 records- 0190US5627102AMethod for making metal interconnection with chlorine plasma etchKAWASAKI STEEL CO·Filed 1995·Granted May 6, 1997·89 cites·23 claims
- 0290US5486492AMethod of forming multilayered wiring structure in semiconductor deviceKAWASAKI STEEL CO·Filed 1993·Granted Jan 23, 1996·115 cites·40 claims
- 0384US5840821ACoating solution and method for preparing the coating solution, method for forming insulating films for semiconductor devices, and method for evaluating the coating solutionKAWASAKI STEEL CO·Filed 1994·Granted Nov 24, 1998·45 cites·32 claims
- 0484US5605867AMethod of manufacturing insulating film of semiconductor device and apparatus for carrying out the sameKAWASAKI STEEL CO·Filed 1993·Granted Feb 25, 1997·86 cites·11 claims
- 0582US5117916ASprinkler head and operation monitor thereforHOCHIKI CO·Filed 1991·Granted Jun 2, 1992·81 cites·6 claims
- 0681US5300321AProcess for depositing titanium nitride film by CVDKAWASAKI STEEL CO·Filed 1993·Granted Apr 5, 1994·45 cites·3 claims
- 0780US6063703AMethod for making metal interconnectionKAWASAKI STEEL CO·Filed 1998·Granted May 16, 2000·49 cites·54 claims
- 0880US5973402AMetal interconnection and method for makingKAWASAKI STEEL CO·Filed 1997·Granted Oct 26, 1999·48 cites·20 claims
- 0979US5209182AChemical vapor deposition apparatus for forming thin filmKAWASAKI STEEL CO·Filed 1992·Granted May 11, 1993·49 cites·7 claims
- 1076US5532191AMethod of chemical mechanical polishing planarization of an insulating film using an etching stopKAWASAKI STEEL CO·Filed 1994·Granted Jul 2, 1996·60 cites·15 claims
- 1176US5290736AMethod of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmosphericKAWASAKI STEEL CO·Filed 1991·Granted Mar 1, 1994·62 cites·8 claims
- 1275US5952723ASemiconductor device having a multilevel interconnection structureKAWASAKI STEEL CO·Filed 1997·Granted Sep 14, 1999·42 cites·33 claims
- 1375US5627345AMultilevel interconnect structureKAWASAKI STEEL CO·Filed 1994·Granted May 6, 1997·45 cites·92 claims
- 1474US5305519AMultilevel interconnect structure and method of manufacturing the sameKAWASAKI STEEL CO·Filed 1992·Granted Apr 26, 1994·49 cites·17 claims
- 1573US6839457B1Bone measuring methodTEIJIN LTD·Filed 2000·Granted Jan 4, 2005·31 cites·12 claims
- 1673US5998522ACoating solution and method for preparing the coating solution, method for forming insulating films for semiconductor devices, and method for evaluating the coating solutionKAWASAKI STEEL CO·Filed 1998·Granted Dec 7, 1999·32 cites·18 claims
- 1772US7390830B1Remedies or prophylactics for diseases in association with chemokinesTEIJIN LTD·Filed 2000·Granted Jun 24, 2008·8 cites·4 claims
- 1872US6001736AMethod of manufacturing semiconductor device and an apparatus for manufacturing the sameKAWASAKI STEEL CO·Filed 1996·Granted Dec 14, 1999·48 cites·37 claims
- 1971US5521423ADielectric structure for anti-fuse programming elementKAWASAKI STEEL CO·Filed 1994·Granted May 28, 1996·45 cites·15 claims
- 2070US5565702AAntifuse element, semiconductor device having antifuse elements, and method for manufacturing the sameKAWASAKI STEEL CO·Filed 1994·Granted Oct 15, 1996·41 cites·17 claims
- 2167US5552181AMethod for supplying liquid material and process for forming thin films using the liquid material supplying methodKAWASAKI STEEL CO·Filed 1993·Granted Sep 3, 1996·29 cites·16 claims
- 2266US5652180AMethod of manufacturing semiconductor device with contact structureKAWASAKI STEEL CO·Filed 1994·Granted Jul 29, 1997·35 cites·25 claims
- 2366US5641985AAntifuse element and semiconductor device having antifuse elementsKAWASAKI STEEL CO·Filed 1994·Granted Jun 24, 1997·35 cites·13 claims
- 2463US2025135226A1Uterine cervical cancer radiotherapy support system, uterine cervical cancer radiotherapy support method, and non-transitory computer-readable recording medium storing uterine cervical cancer radiotherapy support programUNIV SAITAMA MEDICAL·Filed 2023·Application pending·0 cites
- 2562US5225245AChemical vapor deposition method for forming thin filmKAWASAKI STEEL CO·Filed 1990·Granted Jul 6, 1993·23 cites·3 claims
- 2661US5637534AMethod of manufacturing semiconductor device having multilevel interconnection structureKAWASAKI STEEL CO·Filed 1993·Granted Jun 10, 1997·26 cites·64 claims
- 2753US6747748B2Manufacturing method for a field-effect transistor, manufacturing method for a semiconductor device, and apparatus thereforTOKYO ELECTRON LTD·Filed 2001·Granted Jun 8, 2004·6 cites·10 claims
- 2852US5679974AAntifuse element and semiconductor device having antifuse elementsKAWASAKI STEEL CO·Filed 1994·Granted Oct 21, 1997·20 cites·22 claims
- 2948US5308651APhotochemical vapor deposition processKAWASAKI STEEL CO·Filed 1992·Granted May 3, 1994·19 cites·2 claims
- 3044US2005260846A1Substrate processing method, semiconductor device production method, and semiconductor deviceKONDOH EIICHI·Filed 2005·Application pending·0 cites
- 3143US7476619B2Semiconductor deviceTOKYO ELECTRON LTD·Filed 2003·Granted Jan 13, 2009·1 cites·21 claims
- 3243US5946799AMultilevel interconnect method of manufacturingKAWASAKI STEEL CO·Filed 1996·Granted Sep 7, 1999·9 cites·66 claims
- 3340US2008311313A1Film Forming Method and Film Forming ApparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 3437US2005227500A1Method for producing material of electronic deviceTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 3536US2004015105A1Apparatus and method for treating joint diseaseFiled 2002·Application pending·0 cites
- 3636US2004253777A1Method and apparatus for forming filmFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →