Inventor · disambiguated record
Tohru Satake
Also filed as: SATAKE TOHRU
90 granted patents·9 pending applications·2,234 citations·filing 1992–2015
99Inventor score
Top patents by PatentIndex Score
99 records- 0199US7420164B2Objective lens, electron beam system and method of inspecting defectEBARA CORP·Filed 2005·Granted Sep 2, 2008·68 cites·1 claims
- 0299US7109483B2Method for inspecting substrate, substrate inspecting system and electron beam apparatusEBARA CORP·Filed 2001·Granted Sep 19, 2006·159 cites·9 claims
- 0398US9368314B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2014·Granted Jun 14, 2016·38 cites·10 claims
- 0498US7601972B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Oct 13, 2009·49 cites·8 claims
- 0598US7138629B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2004·Granted Nov 21, 2006·151 cites·22 claims
- 0698US6992290B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemTOSHIBA KK·Filed 2001·Granted Jan 31, 2006·97 cites·5 claims
- 0798US6593152B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2001·Granted Jul 15, 2003·109 cites·60 claims
- 0897US7741601B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2008·Granted Jun 22, 2010·36 cites·13 claims
- 0997US7365324B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2006·Granted Apr 29, 2008·49 cites·7 claims
- 1097US7351969B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemEBARA CORP·Filed 2005·Granted Apr 1, 2008·37 cites·5 claims
- 1197US7297949B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2006·Granted Nov 20, 2007·28 cites·6 claims
- 1297US7244932B2Electron beam apparatus and device fabrication method using the electron beam apparatusEBARA CORP·Filed 2001·Granted Jul 17, 2007·74 cites·51 claims
- 1397US7223973B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2005·Granted May 29, 2007·38 cites·10 claims
- 1497US7220604B2Method and apparatus for repairing shape, and method for manufacturing semiconductor device using thoseEBARA CORP·Filed 2005·Granted May 22, 2007·59 cites·11 claims
- 1597US7135676B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2001·Granted Nov 14, 2006·61 cites·12 claims
- 1697US6909092B2Electron beam apparatus and device manufacturing method using sameTOSHIBA KK·Filed 2003·Granted Jun 21, 2005·77 cites·17 claims
- 1797US6855929B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2001·Granted Feb 15, 2005·106 cites·55 claims
- 1896US7569838B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemEBARA CORP·Filed 2008·Granted Aug 4, 2009·23 cites·5 claims
- 1996US7439502B2Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2007·Granted Oct 21, 2008·23 cites·7 claims
- 2096US7417236B2Sheet beam-type testing apparatusEBARA CORP·Filed 2006·Granted Aug 26, 2008·20 cites·18 claims
- 2196US7385197B2Electron beam apparatus and a device manufacturing method using the same apparatusEBARA CORP·Filed 2005·Granted Jun 10, 2008·30 cites·5 claims
- 2296US7049585B2Sheet beam-type testing apparatusEBARA CORP·Filed 2001·Granted May 23, 2006·55 cites·7 claims
- 2395US8822919B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerKIMBA TOSHIFUMI·Filed 2011·Granted Sep 2, 2014·15 cites·10 claims
- 2495US7411191B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Aug 12, 2008·20 cites·4 claims
- 2594US8946631B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2014·Granted Feb 3, 2015·11 cites·14 claims
- 2694US7312449B2Electron beam system and method of manufacturing devices using the systemEBARA CORP·Filed 2005·Granted Dec 25, 2007·20 cites·9 claims
- 2794US7256405B2Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same methodEBARA CORP·Filed 2005·Granted Aug 14, 2007·21 cites·17 claims
- 2894US7241993B2Inspection system by charged particle beam and method of manufacturing devices using the systemTOSHIBA KK·Filed 2001·Granted Jul 10, 2007·54 cites·12 claims
- 2994US7095022B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusNIKON CORP·Filed 2001·Granted Aug 22, 2006·48 cites·13 claims
- 3093US7928378B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2008·Granted Apr 19, 2011·17 cites·11 claims
- 3193US7425703B2Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation methodEBARA CORP·Filed 2005·Granted Sep 16, 2008·16 cites·3 claims
- 3293US7408175B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2007·Granted Aug 5, 2008·19 cites·9 claims
- 3393US7005641B2Electron beam apparatus and a device manufacturing method by using said electron beam apparatusEBARA CORP·Filed 2003·Granted Feb 28, 2006·35 cites·9 claims
- 3492US7829871B2Sheet beam-type testing apparatusEBARA CORP·Filed 2008·Granted Nov 9, 2010·10 cites·7 claims
- 3591US8053726B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2008·Granted Nov 8, 2011·11 cites·11 claims
- 3691US7129485B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2004·Granted Oct 31, 2006·30 cites·8 claims
- 3791US6921722B2Coating, modification and etching of substrate surface with particle beam irradiation of the sameEBARA CORP·Filed 2001·Granted Jul 26, 2005·56 cites·24 claims
- 3890US8803103B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2013·Granted Aug 12, 2014·6 cites·7 claims
- 3990US7247848B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2003·Granted Jul 24, 2007·28 cites·16 claims
- 4090US7109484B2Sheet beam-type inspection apparatusEBARA CORP·Filed 2004·Granted Sep 19, 2006·23 cites·6 claims
- 4189US7157703B2Electron beam systemEBARA CORP·Filed 2003·Granted Jan 2, 2007·29 cites·33 claims
- 4288US7888642B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2008·Granted Feb 15, 2011·9 cites·9 claims
- 4387US7423267B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2006·Granted Sep 9, 2008·8 cites·5 claims
- 4487US6853143B2Electron beam system and method of manufacturing devices using the systemEBARA CORP·Filed 2003·Granted Feb 8, 2005·23 cites·20 claims
- 4586US9406480B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2015·Granted Aug 2, 2016·3 cites·14 claims
- 4685US7408643B2Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samplesEBARA CORP·Filed 2007·Granted Aug 5, 2008·12 cites·7 claims
- 4785US6671034B1Microfabrication of pattern imprintingEBARA CORP·Filed 1999·Granted Dec 30, 2003·47 cites·10 claims
- 4884US7098457B2Electron beam apparatus and device manufacturing method using sameTOSHIBA KK·Filed 2005·Granted Aug 29, 2006·6 cites·16 claims
- 4983US8742341B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusNOJI NOBUHARU·Filed 2010·Granted Jun 3, 2014·4 cites·13 claims
- 5083US8368031B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2011·Granted Feb 5, 2013·3 cites·7 claims
Showing the top 50 of 99 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →