Inventor · disambiguated record
Toshihiko Shindo
Also filed as: SHINDO TOSHIHIKO
8 granted patents·1 pending application·101 citations·filing 1996–2016
85Inventor score
Top patents by PatentIndex Score
9 records- 0193US7951513B2Pellicle and method for producing pellicleSHINETSU CHEMICAL CO·Filed 2009·Granted May 31, 2011·16 cites·20 claims
- 0282US5663865ACeramic electrostatic chuck with built-in heaterSHINETSU CHEMICAL CO·Filed 1996·Granted Sep 2, 1997·71 cites·6 claims
- 0379US7541283B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Jun 2, 2009·5 cites·10 claims
- 0477US7919217B2Pellicle and method for producing pellicleSHINETSU CHEMICAL CO·Filed 2009·Granted Apr 5, 2011·4 cites·16 claims
- 0575US9780037B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2016·Granted Oct 3, 2017·2 cites·13 claims
- 0673US7799238B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Sep 21, 2010·3 cites·5 claims
- 0743US8287750B2Plasma processing method and plasma processing apparatusSHINDO TOSHIHIKO·Filed 2010·Granted Oct 16, 2012·0 cites·7 claims
- 0839US2005106875A1Plasma ashing methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0933US8263498B2Semiconductor device fabricating method, plasma processing system and storage mediumSHIMIZU RYUKICHI·Filed 2007·Granted Sep 11, 2012·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →