Inventor · disambiguated record
Toshiyuki Shiokawa
Also filed as: SHIOKAWA TOSHIYUKI
6 granted patents·2 pending applications·11 citations·filing 2008–2024
73Inventor score
Top patents by PatentIndex Score
8 records- 0180US11309194B2Substrate liquid treatment apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 19, 2022·3 cites·11 claims
- 0279US10483137B2Substrate liquid processing apparatus, substrate liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Nov 19, 2019·3 cites·10 claims
- 0373US9070549B2Substrate processing apparatus and substrate processing methodTANAKA HIROSHI·Filed 2008·Granted Jun 30, 2015·5 cites·18 claims
- 0459US11802848B2pH measuring device and pH measuring methodTOKYO ELECTRON LTD·Filed 2019·Granted Oct 31, 2023·0 cites·7 claims
- 0550US2025130597A1Liquid supply device, liquid supply method, and storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0647US2025246449A1Liquid supply system, liquid processing apparatus, and liquid supply methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0742US9887092B2Etching method, etching apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 6, 2018·0 cites·13 claims
- 0839US11424141B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Aug 23, 2022·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →