Inventor · disambiguated record
Toshihiko Shiozawa
Also filed as: SHIOZAWA TOSHIHIKO
6 granted patents·5 pending applications·200 citations·filing 2005–2010
80Inventor score
Top patents by PatentIndex Score
11 records- 0196US8119530B2Pattern forming method and semiconductor device manufacturing methodHORI MASARU·Filed 2007·Granted Feb 21, 2012·184 cites·20 claims
- 0283US8372761B2Plasma oxidation processing method, plasma processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Feb 12, 2013·9 cites·13 claims
- 0375US7910495B2Plasma oxidizing method, plasma processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Mar 22, 2011·5 cites·12 claims
- 0465US7989364B2Plasma oxidation processing methodUNIV NAGOYA NAT UNIV CORP·Filed 2007·Granted Aug 2, 2011·2 cites·14 claims
- 0547US8043979B2Plasma oxidizing method, storage medium, and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Oct 25, 2011·0 cites·5 claims
- 0646US8003484B2Method for forming silicon oxide film, plasma processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Aug 23, 2011·0 cites·21 claims
- 0746US2010240225A1Microwave plasma processing apparatus, microwave plasma processing method, and microwave-transmissive plateTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0846US2010307685A1Microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0943US2010029093A1Plasma oxidizing method, plasma processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1040US2008093658A1Method for Nitriding Tunnel Oxide Film, Method for Manufacturing Non-Volatile Memory Device, Non-Volatile Memory Device, Control Program and Computer-Readable Recording MediumTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1136US2012184107A1Semiconductor device manufacturing methodSATO YOSHIHIRO·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →