Inventor · disambiguated record
Toshihiro Tachikawa
Also filed as: TACHIKAWA TOSHIHIRO
13 granted patents·3 pending applications·675 citations·filing 1990–2019
92Inventor score
Top patents by PatentIndex Score
16 records- 0196US7503980B2Substrate supporting apparatusNHK SPRING CO LTD·Filed 2006·Granted Mar 17, 2009·527 cites·3 claims
- 0286US6376808B2Heating apparatusNHK SPRING CO LTD·Filed 2001·Granted Apr 23, 2002·41 cites·7 claims
- 0382US7372001B2Ceramics heaterNHK SPRING CO LTD·Filed 2002·Granted May 13, 2008·31 cites·6 claims
- 0480US7220319B2Electrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted May 22, 2007·25 cites·18 claims
- 0576US7241346B2Apparatus for vapor depositionNHK SPRING CO LTD·Filed 2003·Granted Jul 10, 2007·16 cites·13 claims
- 0674US7045747B2Heater unitNHK SPRING CO LTD·Filed 2005·Granted May 16, 2006·5 cites·8 claims
- 0772US7851728B2Heater unitNHK SPRING CO LTD·Filed 2007·Granted Dec 14, 2010·4 cites·20 claims
- 0866USRE42175EElectrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2009·Granted Mar 1, 2011·2 cites·26 claims
- 0964US10462850B2Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heaterHIRANO SATOSHI·Filed 2011·Granted Oct 29, 2019·1 cites·9 claims
- 1063USRE43837ESubstrate supporting apparatusKIDA NAOYA·Filed 2011·Granted Dec 4, 2012·2 cites·5 claims
- 1152US9414441B2Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unitTAKAHARA GOU·Filed 2012·Granted Aug 9, 2016·1 cites·10 claims
- 1251US5092568ACoil spring deviceNHK SPRING CO LTD·Filed 1990·Granted Mar 3, 1992·20 cites·5 claims
- 1340US2006081601A1Device for heating or cooling workpieces and manufacturing method thereforNHK SPRING CO LTD·Filed 2005·Application pending·0 cites
- 1440US2019228953A1Substrate-placing stage and manufacturing method thereofNHK SPRING CO LTD·Filed 2019·Application pending·0 cites
- 1536US10276410B2Substrate support deviceNHK SPRING CO LTD·Filed 2012·Granted Apr 30, 2019·0 cites·14 claims
- 1635US2001029895A1Ceramic heater device and film forming device using the sameNHK SPRING CO LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →