Inventor · disambiguated record
Tom Tillery
Also filed as: TILLERY TOM
2 granted patents·5 citations·filing 2013–2019
46Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0177US10431469B2Method for high aspect ratio photoresist removal in pure reducing plasmaMATTSON TECH INC·Filed 2013·Granted Oct 1, 2019·5 cites·9 claims
- 0252US11107693B2Method for high aspect ratio photoresist removal in pure reducing plasmaBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →