Inventor · disambiguated record
Toshihiro Tojo
Also filed as: TOJO TOSHIHIRO
2 granted patents·2 pending applications·2 citations·filing 2012–2023
33Inventor score
Technology areasH01J
Top patents by PatentIndex Score
4 records- 0169US2023268160A1Antenna unit for inductively coupled plasma, inductively coupled plasma processing apparatus and method thereforTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0261US9543121B2Inductively coupled plasma processing apparatusSASAKI KAZUO·Filed 2012·Granted Jan 10, 2017·2 cites·11 claims
- 0347US2013200043A1Antenna unit for inductively coupled plasma, inductively coupled plasma processing apparatus and method thereforTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0444US12154760B2Inductively-coupled plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Nov 26, 2024·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →