Inventor · disambiguated record
Tobias Ullsperger
Also filed as: ULLSPERGER TOBIAS
0 granted patents·3 pending applications·0 citations·filing 2024–2024
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0164US2024416461A1Method for producing a temperature-controlling hollow structure in a substrate using a processing light beamZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0262US2024419066A1Method for incorporating temperature-regulating hollow structures into a substrate, in particular into a substrate for an optical element, method and substrate for producing an optical element, optical element, processing system and also apparatus pertaining to semiconductor technology and structured electronic componentZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0362US2024329285A1Method and apparatus for producing at least one hollow structure, mirror, euv lithography system, fluid feed apparatus and method for feeding a fluidZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →