Inventor · disambiguated record
Toshiharu Watarai
Also filed as: WATARAI TOSHIHARU
8 granted patents·4 pending applications·1,384 citations·filing 2012–2025
92Inventor score
Top patents by PatentIndex Score
12 records- 0198US10480064B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2018·Granted Nov 19, 2019·47 cites·20 claims
- 0298US10468251B2Method for forming spacers using silicon nitride film for spacer-defined multiple patterningASM IP HOLDING BV·Filed 2017·Granted Nov 5, 2019·379 cites·9 claims
- 0398US10041166B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2017·Granted Aug 7, 2018·57 cites·20 claims
- 0498US10014212B2Selective deposition of metallic filmsASM IP HOLDING BV·Filed 2017·Granted Jul 3, 2018·397 cites·18 claims
- 0598US9803277B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2016·Granted Oct 31, 2017·87 cites·19 claims
- 0698US9805974B1Selective deposition of metallic filmsASM IP HOLDING BV·Filed 2016·Granted Oct 31, 2017·66 cites·21 claims
- 0796US10793946B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2019·Granted Oct 6, 2020·17 cites·21 claims
- 0895USD864134SSusceptorASM IP HOLDING BV·Filed 2018·Granted Oct 22, 2019·334 cites·1 claims
- 0975US2024150894A1Exhaust component cleaning method and substrate processing apparatus including exhaust componentASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1075US2025207249A1Exhaust component cleaning method and substrate processing apparatus including exhaust componentASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1162US2021071296A1Exhaust component cleaning method and substrate processing apparatus including exhaust componentASM IP HOLDING BV·Filed 2020·Application pending·0 cites
- 1243US2014336990A1Measurement device and measurement methodUNIV TOKYO NAT UNIV CORP·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →