Inventor · disambiguated record
Tomoyuki Yahiro
Also filed as: YAHIRO TOMOYUKI
3 granted patents·76 citations·filing 1995–1997
73Inventor score
Top patents by PatentIndex Score
3 records- 0171US5857898AMethod of and apparatus for dressing polishing clothEBARA CORP·Filed 1997·Granted Jan 12, 1999·41 cites·14 claims
- 0269US5876273AApparatus for polishing a waferTOSHIBA KK·Filed 1996·Granted Mar 2, 1999·30 cites·13 claims
- 0333US5543615ABeam charge exchanging apparatusEBARA CORP·Filed 1995·Granted Aug 6, 1996·5 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →