Inventor · disambiguated record
Tomihiro Yonenaga
Also filed as: YONENAGA TOMIHIRO
9 granted patents·1 pending application·590 citations·filing 1992–2015
90Inventor score
Top patents by PatentIndex Score
10 records- 0197US6436193B1Gas processing apparatus baffle member, and gas processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Aug 20, 2002·262 cites·13 claims
- 0290US7648610B2Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plateTOKYO ELECTRON LTD·Filed 2000·Granted Jan 19, 2010·42 cites·8 claims
- 0389US5525160AFilm deposition processing device having transparent support and transfer pinsTOKYO ELECTRON LTD·Filed 1994·Granted Jun 11, 1996·78 cites·4 claims
- 0489US5332442ASurface processing apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jul 26, 1994·139 cites·14 claims
- 0582US8658951B2Heat treatment apparatusYONENAGA TOMIHIRO·Filed 2011·Granted Feb 25, 2014·7 cites·14 claims
- 0669US5972114AFilm deposition apparatus with anti-adhesion film and chamber cooling meansTOKYO ELECTRON LTD·Filed 1996·Granted Oct 26, 1999·32 cites·5 claims
- 0765US8674273B2Heat treatment apparatusYONENAGA TOMIHIRO·Filed 2011·Granted Mar 18, 2014·2 cites·11 claims
- 0864US5711815AFilm forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 1996·Granted Jan 27, 1998·28 cites·10 claims
- 0958US2015093518A1Heat treatment apparatus and heat treatment methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1035US9750087B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 29, 2017·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →